March 12, 2019
Boxboro Regency Hotel & Conference Center
242 Adams Place, Boxborough, Massachusetts
"Extending Copper Plating Technology to New Structures in Advanced Packaging"
Richard Hollman PhD, Principal Process Engineer ASM NEXX, Billerica, Massachusetts
|
Summary: The trend towards heterogeneous integration in packaging has led to a rapid increase in the complexity of the package itself. It has been suggested, on the basis of shrinking features, that fabrication for packaging is coming to resemble wafer fabrication. While there is some truth to this, there are also unique new challenges involved in building the structures required for new package designs. Several examples can be found in Cu plating, where it is necessary to build features both large and small, with a variety of aspect ratios and other novel properties. A creative approach to Cu plating is required in order to develop manufacturing processes for the range of new structures now required. We will show, for example, how principles developed to successfully fill TSVs are adapted to build other feature types.
Speaker: Richard Hollman received his PhD in Physics from Stanford University. He has worked in the electronics industry for over 30 years, in a variety of process technologies, most notably lithography and ECD. He is Principal Process Engineer at ASM NEXX in Billerica MA, a supplier of process tools serving the advanced packaging market. |
|
SCHEDULE (times approximate): |
|
| |
| 5:30 PM | Registration, Socializing, Networking & Cash Bar |
| 6:30 PM | Dinner |
| 7:30 PM | Technical Presentation |
|
The "Member" registration fee will apply to iMAPS Individual Members. Technical Society Chapters who wish to display their membership & event materials at our meetings, contact Harvey Smith (harveys@imapsne.org) You may attend the presentation without eating dinner. Pre-Registration deadline is March Sixth!!! After that, or for Walk-Ins At-Door, the fee is an additional $5.00 [Limited Meal Availability]. Cancellations must be received by 3:00 p.m. Monday 03/11… or The Chapter will bill you for the registration fee. Options: To cancel a registration or register by e-mail, contact Matt Bracy: matt@msdsales.com. |
